A class ~ 1000 clean room is present at the L-NESS, in which all pre-deposition cleaning and device processing is done. The clean room is equipped with ovens, spin-coaters, wet benches, ultrasonic baths, a plasma asher, and an optical microscope. A mask aligner for optical lithography is also inside the clean room.
Fig. 1. Our cleanroom.
The cleanroom safety officer is Daniel Chrastina.
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Last updated: 11th July 2016