L-NESS

Laboratory for Epitaxial Nanostructures on Silicon and Spintronics

Affiliated Institutions

Multi-target sputtering machine

A 10-target magnetron sputtering machine from AJA International is employed for realizing multilayer structures for applications in NanoBiotechnology and Spintronics.

Fig. 1. ATC Orion (AJA international) sputtering machine

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